JVX7200

New X-ray metrology for advanced front-end processes

The latest multichannel platform from Jordan Valley, the JVX7200™, provides manufacturers with production-worthy X-ray metrology capabilities for advanced front-end-of-line processes. In common with all Jordan Valley's JVX tools, the platform was designed to provide high accuracy and repeatable metrology, high uptime and low cost-of-ownership.

The JVX7200™configuration combines advanced high-resolution X-ray diffraction (HRXRD) and X-ray reflectivity (XRR) channels to provide composition, thickness, strain, relaxation characterization and metrology for epitaxial layers such as SiGe and Si:C, which are required for strained silicon processes. Additionally, the XRR channel can provide valuable information on other thin-films, such as those found in high-k gate stacks. The tool is capable of providing rapid, in-line measurements and analysis on both blanket and product wafers.

JVX 7200 Product received the Best of WEST Award 2010

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