QC3 is a High Resolution XRD (HRXRD) system for epilayers (thin films). It is designed for high-throughput, mass production operation.
- Highest throughput in the market
- Rich & flexible in features, yet user-friendly and easy to operate
- Robot support (optional)
- Targets production fabs of LED and Epilayers wafers
- Supports multi-wafer configuration in a single sample-plate
- High up time & reliability
See the QC3 Product page for more information >>
RADS Software (patented) is the leading simulation, analysis & fit software for HRXRD of epitaxial thin-film structures on single crystal substrates.
- Enables accurate and fast XRD measurements' analysis
- Process parameters are automatically calculated
- Immediate process feedback to production
- Process Monitoring results in process and yield improvements
- The leading process monitoring & analysis software since 1991
See the Rads Software product page for more information
You can also request a demo of our RADS software >>
