Jordan Valley Unveils Next-Generation Thin-Film Metrology Platform

December 01, 2005

Austin, TX, December 1, 2005

Jordan Valley, Inc. has announced the release of its JVX™ 6200 metrology tool platform. The new platform combines second generation fast X-ray Reflectivity (XRR), improved micro-spot X-ray Fluorescence (XRF), and industry leading Small Angle X-ray Scattering (SAXS).

The new 6200 platform will deliver significant technological and business advantages to semiconductor manufacturers, according to Sean Jameson, Jordan Valley Vice President of Sales and Marketing.

"The 6200 extends Jordan Valley's lead in x-ray based film measurement systems suitable for high volume production fabs," says Jameson. "The SAXS channel has the capability to measure the pore size and distribution in porous low-k films. The data has shown excellent correlation to PALS techniques and minimum pore size detection to sub-10A diameter pores. Additionally, the system's improved speed, reliability and extendibility significantly reduce cost of ownership-which is of paramount importance in the industry today," he adds.

The new Jordan Valley metrology platform features a smaller maintenance footprint, reduced preventative maintenance, higher throughput on XRR brightness and XRF flux, new algorithm sophistication and a dual-processor CPU that enable true real-time processing. Combined, these features reduce total cost of ownership and provide a truly unique solution to the high volume semiconductor manufacturers.

The 6200 platform's technological innovations also include smaller spot and required pad size XRR and XRF, enhanced performance on high scatter samples and ultra-thin films (<30 Å), extended thickness range XRR, a new Windows®XP operating system, a color camera and microscope with enhanced magnification, increased stage stepping resolution and stage performance on bowed wafers, improved pattern recognition with edge models and increased low-contrast feature performance. In addition, the tool's enhanced "smart" algorithms enable broader search ranges.

Jordan Valley, Inc. is a privately owned company, which provides metrology solutions for thin films based on novel, rapid, non-contacting, and non-destructive x-ray technologies. Jordan Valley's family of JVX™ metrology tools are trusted by major semiconductor manufacturing companies worldwide, and are designed specifically for high-volume fabs. Jordan Valley's primary shareholders are Elron Electronic Industries Ltd. (NASDAQ: ELRN) and Clal Industries and Investments Ltd. (TASE: CII)

For additional information contact Jordan Valley at 1(866) 515-5200 or at www.jordanvalleysemi.com.