D1 Diffractometer

PRODUCT DESCRIPTION

A materials research and development system for 200mm processes and below.
Intended for use with Silicon, III/V, SiC, LED, Solar, Research and Development, & Universities.
The D1 system is a versatile high resolution X-ray system for the characterisation of advanced thin films materials including compound and silicon-based semiconductors. It features a high-flux sealed tube X-ray generator, Si or Ge beam conditioning crystals, a 150 mm x-y mapping stage and a high dynamic range detector within a self-contain X-ray safety enclosure. Options such as a multilayer mirror, crystal analyzer, soller slits and a heat stage further expand the capabilities of the system. The D1 can characterise a variety of materials using a wide range of measurements techniques such as HRXRD (including reciprocal space mapping), XRR and XRD.

High intensity with high resolution
Multiple system configurations
Measures a variety of parameters on a wide range of materials.
Non-destructive measurement techniques
Automation of measurements and experiments:
- Allows very easy change between configurations
- Enables automatic measurements under recipe control
The leading edge analysis SW (RADS, REFS..) for accurate and fast analysis. (worldwide proven with over 100 installations)
Works with Bede analysis software with auto-fitting and presentation graphics
Standard sealed tube X-ray generator
No calibration samples required. X-ray metrology techniques are absolute
Cost-effective system