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Si Semiconductors Metrology
JVX 7200
JVX 6200 Family
JVSensus: Automatic Wafer Breakage and Slip Monitor for 450mm
Compound Semi X-ray Metrology
QC-TT: Wafer Breakage and Slip Monitor
QC-Velox: Advanced Epi Production
Delta-X: Next Generation XRD
QC3: Mainstream Epi Production
QC-RT: Defects in epilayers and sub-surface damage
RADS Software
Semiconductors FEOL
Strain Metrology
High-K & Metal Gate
Silicides
Defect Imaging
Semiconductors BEOL
Cu Seed Barrier
Cu Microstructure
Cu CMP control
Wafer Level Packaging
UBM, RDL & Bumps
Compound semiconductors
HRXRD
Relaxation & Strain
Triple Axis & RSMs
Defect Imaging
Other Applications
General XRR
Polycrystalline XRD
MRAM, GMR & HDD
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