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Semiconductors
JVX 7200
JVX 6200 Family
BedeMetrix™-F
BedeScan™
Compound Semi, General Thin Film
JV QC3 - Production
JV D1: R&D
Semiconductors FEOL
Strain Metrology
High-K & Metal Gate
Silicides
Defect Imaging
Semiconductors BEOL
Cu Seed Barrier
Cu Microstructure
Cu CMP control
Wafer Level Packaging
UBM, RDL & Bumps
Compound semiconductors
HRXRD
Relaxation & Strain
Triple Axis & RSMs
Defect Imaging
Other Applications
General XRR
Polycrystalline XRD
MRAM, GMR & HDD
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Downloads
Presentations
2006 MRS Advanced XRF And Innovative Interconnect and Process Metrology Solution for 45 nm and Beyond
2006 mrs spring 2006 jpg imec presentation.pdf
(1.45 MB)
Download
2007 Altech (IMEC) Characterization of HBT Base Layers by HRXRD
2007 altech imec - characterization of hbt base layers presentation.pdf
(1.05 MB)
Download
2008 EMC In-plane HRXRD from sSOI
2008 emc -in-plane hrxrd from ssoi extended presentation.pdf
(1.04 MB)
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