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JVX7200 X-ray Metrology Tool |
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 New X-ray metrology for advanced front-end processes
The latest multichannel platform from Jordan Valley, the JVX7200™, provides manufacturers with production-worthy X-ray metrology capabilities for advanced front-end-of-line processes. In common with all Jordan Valley’s JVX tools, the platform was designed to provide high accuracy and repeatable metrology, high uptime and low cost-of-ownership. The JVX7200™configuration combines advanced high-resolution X-ray diffraction (HRXRD) and X-ray reflectivity (XRR) channels to provide composition, thickness, strain, relaxation characterization and metrology for epitaxial layers such as SiGe and Si:C, which are required for strained silicon processes. Additionally, the XRR channel can provide valuable information on other thin-films, such as those found in high-k gate stacks. The tool is capable of providing rapid, in-line measurements and analysis on both blanket and product wafers. JVX 7200 Product received the Best of WEST Award 2010
- Low-power, high-brightness X-ray tube
- Convergent beam
- Low-noise, high-resolution 1D detectors
- Small spot size
- Pattern recognition system
- High-precision staging
- Muti-core computer running Windows XP
- Advanced data analysis algorithms and software
- Various loadport options
- Proven SECS/GEM and 300 mm software
- High uptime and low MTBF
- CE, S2, S8 and Peer Group automation certifications
Dependable operation and low COO No alignment overheads Fast measurement times Product wafer capability Fast and familiar tool operation Online/offline analysis of composition, thickness, strain and relaxation of epitaxial layers Reliable and robust factory automation Low COO and high availability Safe and reliable operation
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