News

Leading Equipment Manufacturer Selects JVX7300RF-W for Process Development of Advanced Wafer Level Packaging

2015-08-21T10:54:58+00:00

MIGDAL HAEMEK, Israel, August 19, 2015

Jordan Valley announces the selection of their advanced JVX7300RF-W, by a world leading process equipment manufacturer. The tool was selected following extensive evaluation of tool capability, performance and productivity for development and customers' demonstration of advanced wafer level packaging and thin-film applications.

Jordan Valley, a leading supplier of X-ray based in-line metrology systems for advanced semiconductor manufacturers, today announced that it received an order from a market-leading equipment manufacturer, selecting the new JVX7300RF-W metrology system for advanced process development and control.

The JVX7300RF-W system offers invaluable in-line metrology combining both small spot XRF and first principle XRR and providing solutions for multilayer complex 2D and 3D metal stacks, as well as ultra-thin layers (

The JVX7300RF-W delivers high ROI and low CoO for its inline metrology of next generation Wafer Level Packaging (WLP) advanced micro-bump process development and control, allowing high throughput non-destructive thickness and composition measurements.

JVX7300RF-W is the successor to the production proven JVX6200iRF with extended capabilities and significant productivity improvements. The 7300RF-W allows metrology on smaller features necessary to adhere to the industry roadmaps and the WLP segment's unique needs among others.

"This order marks the true need of JVX7300RF-W for the development and control for advanced WLP and other thin-films" stated Asaf Shlomo, Jordan Valley's Product Marketing Manager. "This engagement from a leading equipment manufacturer is further acknowledgement of the high value of the JVX7300RF-W tool to provide advanced WLP and plating process metrology solutions," added Shlomo.

Isaac Mazor, Jordan Valley CEO, noted, "We are proud of this win, to be part of center of excellence of another leading supplier, where we will demo our tool as part of advanced tool set for our mutual customers."

About the JVX7300RF-W production metrology tool

The JVX7300RF-W is a production worthy X-ray metrology tool combining small-spot XRF and XRR measurement channels. The tool targets both FEOL applications for nodes at 20nm and lower, and advanced WLP manufacturing. The tool is configured for full fab automation and is SEMI S2/S8 and CE certified.

About Jordan Valley Semiconductors Ltd

Jordan Valley Semiconductors (JVS) is the leader in X-ray metrology and defect detection tools for the semiconductor industry. Jordan Valley's tools are fully automated non-contacting and non-destructive tools designed for production control on patterned or blanket wafers.

The company offers the semiconductor industry the most comprehensive portfolio of advanced metrology and defect inspection tools, based on X-ray technologies such as XRR (X-ray reflectometry), XRF (X-ray fluorescence), XRD (X-ray diffraction) and others.

Jordan Valley's investors include Clal Industries and Investments Ltd. (TASE:CII), Intel Capital (INTC) and Elron Electronics Industries Ltd. (ELRN.TA). With headquarters in Migdal Haemek, Israel, the company has subsidiaries in Durham UK, Austin TX USA, Hsin-Chu Taiwan, Suwon Korea and other offices and sales representatives worldwide.

For more information:
Asaf Shlomo
Product Marketing Manager
Tel: +972-4654-3666
[email protected]">[email protected]
www.jvsemi.com

AIXTRON, Inc. Selects Jordan Valley QC3 for Advanced MOCVD Process Metrology

2015-04-02T12:07:19+00:00

MIGDAL HAEMEK, Israel, April 2, 2015

Jordan Valley, a leading supplier of X-ray based in-line metrology systems for advanced semiconductor manufacturers and equipment suppliers, today announced that it received a strategic order for its QC3 High Resolution X-ray Diffraction (HRXRD) System for strain & thin films metrology from AIXTRON R&D center in the USA.

Jordan Valley QC3 and QC-Velox systems are the industry leading metrology and characterization tools for MOCVD Chamber qualification, used for epi growth of GaN and III-V semiconductors structures. Since the QC3 system introduction in 2010, it has become the tool of record for both production monitoring and advanced R&D in the areas of GaN based LED and other devices. The system was ordered following a 6 month extensive evaluation by AIXTRON's US R&D Center in Sunnyvale, California.

Isaac Mazor, Jordan Valley's CEO, said: "We are pleased to have been selected by MOCVD market leaders such as AIXTRON, Inc. to support their advanced metrology requirements. This selection represents the customer's confidence in Jordan Valley's ability to provide valuable metrology solutions for their demanding applications, trusting the first-principle X-ray based metrology."

The Jordan Valley QC3 provides advanced HRXRD metrology with high throughput and precision in a very compact package. The addition of Jordan Valley's Industry leading RADS analysis software significantly enhances productivity and makes the characterization of complex epi-layers routine and automatic. "By choosing the Jordan Valley QC3 platform, AIXTRON, Inc., the German group's US-based affiliate, acknowledged the product robustness, performance and extendibility to future technology challenges. We believe that the Jordan Valley QC3 can be a strong contributor to the rapid and advanced deposition technology development," added Dr. Paul Ryan, JVUK manager.

Jordan Valley's management will attend Semicon West in San Francisco on July 14-16, 2015.

About Jordan Valley Semiconductors Ltd.

Jordan Valley Semiconductors (JVS), the leader in X-ray metrology and defect detection tools for the semiconductor industry. Jordan Valley's tools are fully automated non-contacting and non-destructive tools designed for production control on patterned or blanket wafers.

Jordan Valley's investors include Clal Industries and Investments Ltd. (TASE:CII), Intel Capital (INTC) and Elron Electronics Industries Ltd. (ELRN.TA). With headquarters in Migdal Haemek Israel, the company has subsidiaries in Durham UK, Austin TX, USA, Hsin-Chu Taiwan, Suwon Korea and other offices and sales representatives worldwide.

For more information:
Gali Ashkenazi
Tel: +972-4654-3666 ext#106
[email protected]">[email protected]
www.jvsemi.com

Multiple Foundries in Asia Select JVX7300HR X-ray Metrology Tool

2015-07-02T13:08:07+00:00

MIGDAL HAEMEK, Israel, June 29, 2015

Jordan Valley (JV), a leading supplier of X-ray based in-line metrology solutions for advanced semiconductor manufacturers, today announced that it has received orders for its latest generation JVX7300HR front-end-of-line (FEOL) strain & thin-film metrology tool from multiple foundries in Asia.

The innovative JVX7300HR tool provides in-line, first principle metrology for product-wafers at the 28 nm, and below, technology nodes. The high-resolution X-ray diffraction (HRXRD) measurement channel provides a unique monitoring capability for epitaxial materials, such as SiGe, Si:C, Si:P, providing information on strain and epitaxial quality on both bulk Si and (FD)SOI substrates. Additionally, the X-ray reflectivity (XRR) channel provides thin-film thickness monitoring for complex stacking including high-k / metal gate (HKMG) stack analysis

Dr. Alex Tokar, JV's worldwide applications manager explained that JVX7300HR was developed with the unique challenges that the advanced technology nodes pose. The tool provides superior performance to its competitors for complex multi-layer epi and HKMG stacks. High-throughput X-ray metrology provides unique capabilities compared to traditional optical techniques with improved productivity and hence reduced CoO. The JVX7300HR provides advanced capabilities such as reciprocal space maps (RSMs) on product wafers for development and production ramp and hybrid metrology support.

Isaac Mazor, JV's CEO added: "Our unique Fast HRXRD and XRR technologies have been proven to be crucial for process ramp-up and in-line metrology, especially for epi. quality monitoring. The JVX7300HR was designed based on our experience gained working in the fabs of the leading logic players. Our existing customers appreciate our experience in providing unique X-ray based metrology solutions. Our customers benefit from the JVX7300 from faster process ramp-up and control with a lower cost of measurement."

About the JVX7300HR production metrology tool

The JVX7300HR is a production worthy X-ray metrology tool combining XRR and HRXRD channels. The tool targets FEOL applications for the 28nm technology node and below. The JVX7300HR supersedes the JVX7200HR (Best-of-West 2010 award winner)

Jordan Valley's management will attend Semicon West in San Francisco on July 14-16, 2015. To schedule a meeting, please contact [email protected]">[email protected]

About Jordan Valley Semiconductors Ltd.

Jordan Valley Semiconductors (JVS), the leader in X-ray metrology and crystalline defect detection tools for the semiconductor industry. Jordan Valley's tools are fully automated non-contacting and non-destructive tools designed for production control on patterned or blanket wafers.

Jordan Valley's investors include Clal Industries and Investments Ltd. (TASE:CII), Intel Capital (INTC) and Elron Electronics Industries Ltd. (ELRN.TA). With headquarters in Migdal Haemek Israel, the company has subsidiaries in Durham UK, Austin TX, USA, Hsin-Chu Taiwan, Suwon Korea and other offices and sales representatives worldwide.

For more information:
Gali Ashkenazi
Tel: +972-4654-3666
Email: [email protected]">Gali Ashkenazi

Leading HDD Manufacturer Adopts Jordan Valley's JVX7300RF (XRR&XRF) Platform for Metrology of Advanced Magnetic Heads

2015-06-08T12:23:03+00:00

MIGDAL HAEMEK, Israel, June 8, 2015

Jordan Valley, the dominant supplier of X-ray based in-line metrology systems for the semiconductor and related industries, today announced it received a repeat order from a leading HDD manufacturer who selected the new JVX7300RF metrology system for their advanced process control.

The JVX7300RF system provides high-value in-line metrology capabilities and combines Jordan Valley's unique convergentbeam XRR and the vertical small spot XRF measurement channels on their latest generation tool platform. The tool provides product wafers metrology solutions for complex multilayer stacks, ultra-thin layers (<10Å) and small pads.

The JVX7300RF provides excellent ROI and CoO for inline metrology of magnetic stacks used in latest generation of read-heads and allows non-destructive thickness and composition measurements at high throughputs prior to head assembly.

The customer noted that the JVX7300RF was ordered after successful evaluation of the combined XRR/XRF technology in multiple production sites last year.

Isaac Mazor, Jordan Valley's CEO commented: "This tool was selected due to its substantial return of investment. Hard disk manufacturers set unique metrology challenges and requirements for advanced process control. The JVX7300RF is the successor of the production proven JVX6200iRF and provides significantly improved productivity, new capabilities, improved ease-of-use, maintainability and more."

About the JVX7300RF production metrology tool

The JVX7300RF is a production worthy X-ray metrology tool combining XRR and XRF channels. The tool targets both semiconductor 20nm and below FEOL applications and advanced HDD manufacturing. The tool is configured for full fab automation and is SEMI S2/S8 and CE certified.

Jordan Valley's management will attend Semicon West in San Francisco on July 14-16, 2015. To schedule a meeting, please contact [email protected]

About Jordan Valley Semiconductors Ltd.

Jordan Valley Semiconductors (JVS) is the leader in X-ray metrology and defect detection tools for the semiconductor industries. Jordan Valley's tools are fully automated non-contacting and non-destructive tools designed for production control on patterned or blanket wafers.

Jordan Valley's investors include Clal Industries and Investments Ltd. (TASE: CII), Intel Capital (NASDAQ: INTC) and Elron Electronics Industries Ltd. (TASE: ELRN). With headquarters in Migdal Haemek Israel, the company has subsidiaries in Durham UK, Austin TX, USA, Hsin-Chu Taiwan, Suwon Korea and other offices and sales representatives worldwide.

For more information:
Gali Ashkenazi
Tel: +972-4654-3666
[email protected]">[email protected]
www.jordanvalley.com

Multiple Customers Select JVS for Inline GaN/Si Process Control

2014-07-10T13:21:42+00:00

MIGDAL HAEMEK, Israel, July 7, 2014

Jordan Valley Semiconductors Ltd., a leading supplier of X-ray based metrology tools for advanced semiconductor manufacturing lines, today announced that it has recently delivered and successfully commissioned its JVX7300L in-line X-ray metrology tool at multiple customers. The systems have been purchased for in-fab process development and automated production monitoring of GaN on Si wafers.

Isaac Mazor, Jordan Valley's CEO, said: "We are pleased to have been selected by key customers to provide in-line metrology for their GaN on Si manufacturing. We believe Jordan Valley is well positioned to support this and other emerging applications, with our comprehensive portfolio of X-ray based technologies and tools. These selections represent the customers' confidence in Jordan Valley's ability to provide innovative and robust solutions for their demanding process development and control needs."

Dr. Paul Ryan, Corporate VP and JV-UK manager noted, "GaN on Si technology presents new metrology challenges and requirements that only High-Resolution X-ray Diffraction (HRXRD) can adequately address. We have been supporting the manufacturing needs of both the compound and silicon semiconductor industries for many years. Bringing together these technologies Jordan Valley can provide solutions for the characterization of these advanced material systems, while meeting the customers' stringent process and automation requirements in a short period of development time. The JVX7300L provides the highest-level of automation, flexibility and robustness for such emerging applications. In choosing the JVX7300L platform, the customers' acknowledged the significant contribution of the product in shortening their process development cycle, together with the ability to use the same tool for production monitoring to help drive yield enhancement."

The JVX7300L is a production worthy X-ray metrology system for GaN on Si and other More-than-Moore applications and can be used for both in-fab process development and production monitoring. The tool supports a wide range of X-ray metrology modes, scanning HRXRD, XRR and (GI)XRD, to provide solutions for a wide range of materials and structures. HRXRD is capable of measuring the composition, thickness strain/relaxation of single and multiple epilayer stacks. Additionally, with XRR and (GI)XRD channels, the tool can also provide information on the thickness and density of a wide range of thin-films as well as providing unique microstructure information (crystallinity, grain-size and phase) of polycrystalline thin-films. Unlike optical or spectroscopic tools, HRXRD and XRR are first principle techniques that deliver accurate and precise results without calibration.

Jordan Valley's management will attend Semicon West 2014 in San Francisco on July 7-10, 2014.

About Jordan Valley Semiconductors Ltd.

The company offers the semiconductor industry the most comprehensive portfolio of advanced metrology and defect inspection tools, based on X-ray technologies such as XRR (X-ray reflectomerty), XRF (X-ray fluorescence), XRD (X-ray diffraction) and others.

For more information:

Gali Ashkenazi
Tel: +972-4654-3666
Tel: +1-512-832-8470
[email protected]">[email protected]

JVS Wins More Market Share in Advanced Wafer Level Packaging

2014-07-10T13:38:05+00:00

MIGDAL HAEMEK, Israel, July 3, 2014

Jordan Valley Semiconductors Ltd. [http://www.jordanvalley.com], a leading supplier of X-ray based metrology tools for advanced semiconductor manufacturing lines, today announced that its micro-spot X-ray Fluorescence (µXRF) metrology tool has been qualified for production monitoring of advanced Wafer Level Packaging (WLP) processes, by another leading memory player. The tool provides fully automated metrology solutions for several key applications, including single µ-bump chemical composition and height measurements, as well as control of multi-layer Under Bump Metallization (UBM) stack deposition.

Isaac Mazor, Jordan Valley's CEO, said: "We are glad to add another leading memory customer to our distinguished list of advanced customers. This is additional proof that Jordan Valley's tool and technology superiority is well appreciated and serves leading companies in the industry. Advancements in WLP technologies, such as the scaling down of solder bumps, complex UBM stacks, etc., set new metrology challenges and requirements that Jordan Valley can address. We believe that our tools will further contribute to our customer's high yield targets in the current and future WLP process."

Jordan Valley's micro-XRF metrology tool is the "tool of record" for single bump composition measurements. It is ideal for non-destructive, in-line µ-bump %Ag measurements and uses a vertical excitation geometry that provides the smallest beam footprint with no dependence on height variation. The tool provides information critical for WLP process control, and comes with fully automated recipe driven measurements and analysis capabilities, advanced navigation algorithms for measurement on product wafers and more.

Jordan Valley's management will attend Semicon West 2014 in San Francisco on July 7-10, 2014.

About the company:

Jordan Valley is a market leader in X-ray metrology and non-visual defect detection tools for the semiconductor industry.

Jordan Valley's tools are fully automated non-contacting and non-destructive tools, designed for production control on patterned or blanket wafers.

Jordan Valley offers a comprehensive portfolio of advanced metrology and defect detection tools, based on X-ray technologies such as XRR (X-ray reflectomerty), XRF (X-ray fluorescence), XRD (X-ray diffraction) and others.

Jordan Valley's investors include Clal Industries and Investments Ltd. (TASE: CII), Intel Capital (NASDAQ:INTC) and Elron Electronics Industries Ltd. (TASE: ELRN).

With headquarters in Migdal Haemek Israel, the company has subsidiaries in Durham UK, Austin TX, USA, Hsin-Chu Taiwan, Suwon Korea, and other offices and sales representatives worldwide.

For more information:

Gali Ashkenazi
Tel: +972-4654-3666
Tel: +1-512-832-8470
[email protected]

Leading Semiconductor Players Select JVX7300LMI for 14nm & 10nm Process Development and Ramp-up

2013-10-01T00:00:00+00:00

MIGDAL HAEMEK, Israel, October 1, 2013

Jordan Valley Semiconductors Ltd., a leading supplier of X-ray based metrology tools for advanced semiconductor manufacturing lines, today announced that it has received another order for its recently introduced JVX7300LMI scanning X-ray in-line metrology tool for patterned and blanket wafers. The system has been purchased for advanced process development and production ramp-up for 14nm and 10nm nodes.

The tool provides fully automated advanced metrology for epitaxial materials such as SiGe, Si:C/P and III-V on silicon FinFET structures, as well as high-k and metal gate stacks and other critical layers.

Isaac Mazor, JV CEO, said: "We are pleased to have been selected by key customers to support their FEOL (Front-End-Of-Line) process metrology. This selection represents the customers' confidence in Jordan Valley's ability to provide valuable metrology solutions for their most demanding advanced applications, trusting first principle X-ray based metrology to provide unique process control solutions."

Mazor added, "Advanced logic devices set new metrology challenges and requirements for key transistor level structure such as FinFET, Ge & III/V materials on silicon, as well as high-k and metal gate stacks used to enhance the transistor performance. Jordan Valley was able to meet the customers' stringent process requirements in a short period of development time."

"In choosing the JVX7300LMI platform, the customers acknowledged the significant contribution of the product in shortening the process development cycle, coupled with enabling process performance and extendibility to future technology nodes." Mazor concluded, "We believe that the JVX7300LMI can be a strong contributor to assure high yield in the current and next generation process nodes."

About the JVX7300LMI metrology tool
The JVX7300LMI is an production worthy X-ray metrology system for 14nm & 10nm nodes R&D and production ramp for FEOL applications such as SiGe, Si:C/P, FinFETs, high-k/metal gate and replacement channel materials such as Ge and III-V layers on Si. It is also used for the development and production of the emerging GaN on Si market.
This tool enables scanning HRXRD, XRR and (GI)XRD measurements. HRXRD is capable of measuring epitaxial layer composition, thickness, density, strain and relaxation of single and multi-layer stacks. Additionally, with XRR and (GI)XRD channels, the tool provides information on the thickness, density, phase and crystallinity of ultra-thin layers typically used in the FEOL process. Unlike optical or spectroscopic tools, the HRXRD and XRR are first principle techniques that deliver accurate and precise results without calibration.

Click here to visit the JVX7300LMI page

About Jordan Valley Semiconductors Ltd. http://www.jvsemi.com

Jordan Valley Semiconductors (JVS), the leader in X-ray metrology and defect detection tools for the semiconductor industry. Jordan Valley's tools are fully automated non-contacting and non-destructive tools designed for production control on patterned or blanket wafers.
The company offers the semiconductor industry the most comprehensive portfolio of advanced metrology and defect inspection tools, based on X-ray technologies such as XRR (X-ray reflectomerty), XRF (X-ray fluorescence), XRD (X-ray diffraction) and others.

Jordan Valley's investors include Clal Industries and Investments Ltd. (TASE: CII), Intel Capital (NASDAQ: INTC) and Elron Electronics Industries Ltd. (TASE: ELRN).With headquarters in Migdal Haemek Israel, the company has subsidiaries in Durham UK, Austin TX, USA, Hsin-Chu Taiwan, Suwon Korea and other offices and sales representatives worldwide.

NanoKTN Helps Steer UK’s Commercial Exploitation of European Silicon Wafer Damage Research

2013-10-14T00:00:00+00:00

The Nanotechnology Knowledge Transfer Network (NanoKTN), one of the UK’s primary knowledge-based networks for Micro and Nanotechnologies, is pleased to announce that it has helped steer the UK commercial exploitation of European silicon wafer damage research.
The research has been used by Jordan Valley Semiconductors, a leading supplier of X-ray based in-line metrology and defect detection systems for advanced semiconductor manufacturing lines, to deliver new metrology solutions to new International companies.

The SIDAM (Silicon Wafer Damage) European Commission project gathered partners from different European countries: Jordan Valley Semiconductors Ltd as the industrial partner from the UK, and the Universities of Durham, Dublin City, Freiburg (Germany), CEIT San Sebastian (Spain), and the ANKA synchrotron, Karlsruhe (Germany).

The aim of the project was to discover how to derive quantitative, predictive information from X-ray Diffraction Imaging (XRDI), enabling a breakthrough metrology of wafer inspection. The outcome of this research was offered as a competitive advantage to those members of the European Semiconductor Industry who agreed to join the Industrial Advisory Board. The NanoKTN sat on the Industrial Advisory Board to assist with the future commercial exploitation for UK companies.

Dr Paul Ryan, Jordan Valley UK Subsidiary Manager comments, “Many semiconductor manufacturing companies have problems with wafer handling, as it introduces micro cracks at the wafer edge. During rapid thermal processing these can grow into cracks, shattering the wafer and disrupting manufacture. With the help of the SIDAM project, we were able to devise techniques to reveal the nature of the defects in the wafers and their relevance to semiconductor device fabrication. Working with the NanoKTN, we used the research to further develop our JVSensus™ system, a non-destructive, in-line tool for detection of non visual, crystalline defects (NVD) on patterned or blanket wafers.”

The company has since used NanoKTN and JEMI events to showcase its new system, and last month shipped its JVSensus™ system to a leading Asian semiconductor foundry manufacturer, who has implemented the tool as part of its process.

Dr Paul Ryan continues, “JVSensus is evidence that our strategy of turning X-Ray imaging into production worthy defect detection tool, successfully delivers the right product for the benefit of our customers. This could provide Europe with a competitive advantage in the development of both 450mm and thin silicon wafers. The knowledge and tools developed will contribute to maintaining Europe’s leading position in semiconductor x-ray metrology.”

Dr Alec Reader, Director at the NanoKTN explains, “Jordan Valley Semiconductors is a great example of a UK company using research and development funding to further develop its technological breakthroughs into viable products with real commercial potential. We would urge all UK SMEs to get involved in European funding opportunities to help their businesses grow.”

For further information about the NanoKTN, please visit www.nanoktn.com or email [email protected].">[email protected].

Established by the Technology Strategy Board, the NanoKTN is managed by Centre for Process Innovation Ltd, a leading technology development and consulting company.

Article Reference: http://www.azosensors.com/news.aspx?newsID=6675

Jordan Valley Named Mr. Sharon Laor Vice President of Sales

2013-07-18T00:00:00+00:00

MIGDAL HAEMEK, Israel, July 10, 2013 /PRNewswire/ --

Jordan Valley announced today that Mr. Sharon Laor joined the company as Vice President of Sales. Leveraging his 20 years of sales management experience, Mr. Laor will lead the company's Worldwide Sales, and will report directly to the company's CEO, Mr. Isaac Mazor.

Mr. Laor has a wide international business management experience, having worked for leading high-tech companies including: Motorola, Gilat, Amdocs and Nova Measuring Instruments. On top of selling globally, Mr. Laor gained marketing and business development experience in a variety of disciplines and markets. Mr. Laor is familiar with the Semiconductors industry, especially with metrology solutions for advanced technology nodes in Foundries, Logic and Memory manufacturers.

"Jordan Valley succesfuly developed a new line of promising products, utilizing its unique X-Ray technology, and now it is the right time to strengthen our sales organization. Mr. Laor brings with him wide sales management experience, passion and drive that I am certain will help us grow our comapny. I strongly believe Mr. Laor is the right candidate to take JV to the next level", noted Mr. Mazor.

"I am very exceited to join the Jordan Valley family and take this challenging position. I believe the company's unique technologies, new products, customer presence and strong management, can make it one of the leading players in the metrology and defect industries, and I want to be part of that journey", added Mr. Laor.

Mr. Laor holds B.Sc. in Mechanical Engineering and MBA from the Tel Aviv University in Israel.

Repeat Orders for Sub-20nm JVX7300HR

2013-07-09T10:12:00+00:00

Jordan Valley receives repeat orders for its Sub-20nm JVX7300HR Metrology Systems from a Leading Foundry in Asia

MIGDAL HAEMEK, Israel, July 8, 2013 /PRNewswire/ --

Jordan Valley, a leading supplier of X-ray based in-line metrology systems for advanced semiconductor manufacturers, today announced that it received repeat orders for its new JVX7300HR front-end-of-line strain & thin films metrology system from a leading foundry in Asia.

The JVX7300HR system provides in-line, first principle metrology solution for advanced epi (SiGe, Si:C, strain, FinFET) and HKMG (HfO, TiN, TaN) stack analysis for 20 nm (nanometer) and below technology nodes. The JVX7300HR supersedes the JVX7200HR (Best-of-West 2010 award winner) with added capabilities and significant productivity improvements. The company noted that the systems were ordered after successful evaluation of the technology in multiple production sites last year.

Isaac Mazor, Jordan Valley's CEO said: "We are pleased to have been selected by our long-standing customer to support their sub 20nm node FEOL process metrology. This selection represents the customer's confidence in Jordan Valley's ability to provide valuable metrology solutions for their demanding applications, trusting the first-principle X-ray based metrology to provide process control that is superior to the traditional optical metrology".

Advanced technology nodes set new metrology challenges and requirements for advanced process elements such as epi and high-k/metal gate stacks used to enhance the performance of planar and FinFET transistors.

The JVX7300HR provides new capabilities, including XRR/HRXRD hybrid metrology, significantly improved productivity, the ability to measure on patterned wafers, and more."By choosing the JVX7300HR platform, the customer acknowledged the product robustness, performance and extendibility to future technology nodes. We believe that the JVX7300HR can be a strong contributor to assure high yield in the current and next generation process nodes, especially for logic and foundry players”. Concluded Isaac Mazor.

About the JVX7300HR production metrology tool
The JVX7300HR is a production worthy X-ray metrology tool combining XRR and HRXRD channels. The tool targets 20nm and below FEOL applications. The tool is configured for full fab automation and is SEMI S2/S8 and CE certified.

Request more information