QC-Velox

qc-veloxThe Jordan Valley QC-Velox is a next-generation High Resolution XRD (HRXRD) system for epilayers (thin films), targeting LED, CPV and Epi-Layers wafer manufacturers. It is designed for ultra high-throughput, mass production operation

  • Advanced, Enhanced HRXRD for LED, CPV and Epi-Layers wafer manufacturers
  • Next-Generation technology HRXRD
  • VeloMAX™ Highest Intensity in the market:
    • Ultra-high throughput HRXRD for mass-production
    • Fastest measurements with very-high accuracy & repeatability
  • Designed to comply with SEMI standards (robot-ready, cleanliness)
  • Bar-code reader enables fast & error-free wafer-loading operation
  • VeloSWAP™ Kinematic sample-plates (including 31x2") increase ease-of-operation & throughput
  • Video camera enables viewing tool's interior during operation
  • QC-Velox is based on QC3 technology:
    • QC3 is the Market leader, field proven, stable, robust HRXRD

QC-Velox measurements are followed by RADS software analysis, providing fast and accurate calculation of the process parameters with immediate feedback to production. This results in yields & profitability enhancements.

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Details

metrologycycleThe QC-Velox high throughput coupled with excellent repeatability enables fast feedback of the layer quality and structure. This can only be achieved with

  • High throughput measurements
  • Fast, accurate analysis
  • Fast, convenient and user-friendly feedback.

The QC-Velox utilised the latest generation of HRXRD technology to enable the highest throughput on the market for HRXRD, coupled with repeatable data.

Once the data is collected, often in a few seconds, the data is automatically analyzed using JV RADS, the most trusted and popular HRXRD analysis software available.

Once the data is collected, the results are displayed in a user-customisable report, which includes the layer information but also statistics about the wafer. Other useful information, such as wafer bow and radius of curvature can also be displayed on the report. This report is saved locally, displayed to the user and can also be saved onto a network path to enable any department.

The QC-Velox is critical to all processes involving epi growth. Typically the growth is performed using MOCVD, but the metrology equally applies to MOVPE and MBE systems.

Materials

The QC-Velox is suitable for most semiconductor-based structures and device structures, including, but not limited to:

  • GaN-based LEDs and laser structures
  • III-V, II-VI and IV-IV based materials (HEMTs, HBTs...)
  • Si based materials
  • SiGe-based HBT structures
  • Single and multilayer epitaxial films
  • MQW structures
  • Superlattice structures

Techniques

  • High resolution X-ray rocking curves
  • Symmetric, asymmetric and quasi-forbidden 002 reflection capability
  • Layer relaxation, tilt and thickness determination
  • Triple axis analyzer measurements and reciprocal space maps
  • Area uniformity plots
  • Substrate perfection and offcut measurements

Specification

General

  • Compact, high-resolution diffractometer
  • Horizontal specimen mounting on detachable holders - up to 300mm sample size
  • Full 300mm scanning capability with sample plates with multiple wafer locations
  • Pre-aligned beam conditioners available for materials with low dislocation content, such as GaAs, InP, and Si based compounds, and materials with higher defect densities, such as GaN and ZnO.
  • EDRc Dynamic Range X-ray detector
  • Triple Axis as standard
  • Bar-code reader for sample loading
  • Robot loading option available

Enclosure

  • Fully contained within a free-standing steel enclosure
  • Easy sample access
  • Full X-ray safety interlocks, fail-safe shutter and warning lamps
  • Size (approx): 1m x 1m