Delta-X

Jordan Valley's Delta-X is the latest generation of flexible X-ray diffraction instruments for thin-film materials research, process development, and quality control.

  • High intensity with high resolutionDelta-X Image
  • Automation of sample alignment, measurement and analysis
  • Works with leading edge analysis software (RADS for HRXRD, REFS for XRR) for accurate and fast analysis (worldwide proven with over 100 installations)
  • Automated tool alignment (source and detector optics) between multiple configurations to optimize system intensity and resolution for each measurement type:
  • Supports wide range of thin film applications:
    • HRXRD: Thickness, Composition, Relaxation and Strain measurements in epilayers
    • XRR: Thickness, Density and Roughness measurements of thin films. Pore size measurements of porous films.
    • WA-XRD: Phase, Crystalline texture, Crystallinity, Residual stress, Grain size of polycrystlline thin films
  • Area uniformity (wafer mapping up to 300mm x 300mm) for all measurements
  • No calibration samples required: X-ray metrology techniques are absolute

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Detail

 

Jordan Valley's Delta-X is the latest generation of flexible X-ray diffraction instruments for thin-film materials research, process development, and quality control. Featuring fully automated source optics, the system can switch between standard XRD, High-Resolution, and X-ray reflectivity modes without user intervention. Measurements can be run in partial or fully automated modes, with user-customizable scripts handling the routine work. The instrument is designed for a variety of thin-film applications, including high resolution rocking curves, reciprocal space mapping, X-ray topography (digital imaging), X-ray reflectivity, Grazing Incidence XRD, Phase ID, residual stress, film texture and grain size analysis. The sample stage consists of a robust 5-axis Eulerian cradle, with 300 mm wafer mapping, and capacity for both large and small samples, and multi-sample locations. Leading edge data analysis packages, such as RADS and REFS provide expert data presentation and interpretation. The Delta-X is the ideal, multi-application thin-film materials research tool – for now and into the future.

The Delta-X is a materials research and development system for 300mm processes and below. Intended for use with Silicon, III/V, SiC, LED, Solar, Research and Development, & Universities.

Materials

The Delta-X can be used for virtually any thin film analysis. Some of the parameters which can be measured are:

  • Thickness
  • Composition
  • Relaxation
  • Strain
  • Area uniformity
  • Density
  • Roughness
  • Phase
  • Crystalline texture
  • Crystallinity
  • Residual stress
  • Pore size
  • Grain size

Techniques

  • HRXRD, relaxation and XRR of Epitaxial films (SiGe, Si:C)
  • Reciprocal space maping and triple axis analyzer measurements of epitaxial films
  • HRXRD of Crystalline substrates (Si, SiC, III/V)
  • XRR & XRD of Polycrystalline films
  • XRR and SAXS of Porous films

Specification

Source

  • Standard 2.2kW sealed tube X-ray generator
  • Parabolic Multilayer Mirror
  • Choice of beam conditioning crystals for wide range of resolutions (5", 10", 12", 25")
  • Intelligent Alignment System, automatically configuring the tool with the best optics for the specified measurement

Sample Stage

  • Simple tilt / Z stage
  • Full Eulerian cradle with
    • High resolution goniometer (0.2" resolution on Omega and 2Theta)
    • 10µm resolution on XY axes, 1µm resolution on Z
    • 300mm scanning on X and Y, with 300mm wafer or multiple smaller wafer capability
    • 100o range on tilt (Chi) for pole figure and residual stress capability
    • Full 360o range on Phi (rotation)
  • Vertical geometry to avoid gravity sag

Detection

  • High dynamic range scintillation detector (EDRc)
  • Choice of detector optics
    • Triple axis analyzer crystal, for precise detector angle definition
    • Soller slits for polycrystalline XRD work to allow a wide parallel beam into the detector - essential for glancing incidence XRD work
  • Motorized source and detector slits with automated attenuator
  • Intelligent Alignment System, automatically configuring the tool with the best optics for the specified measurement