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D1 Evolution: Leading versatile and flexible X-ray diffraction instrument

Jordan Valley’s D1 Evolution is the latest generation of flexible X-ray diffraction instruments for thin-film materials research, process development, and quality control.

D1 Evolution from Jordan Valley

  • High intensity with high resolution
  • Automation of sample alignment, measurement and analysis
  • Works with leading edge analysis software (RADS for HRXRD, REFS for XRR) for accurate and fast analysis (worldwide proven with over 100 installations)
  •  Automated tool alignment (source and detector optics) between multiple configurations to optimize system intensity and resolution for each measurement type:
  •   Supports wide range of thin film applications:
  • HRXRD: Thickness, Composition, Relaxation and Strain measurements in epilayers
  • XRR: Thickness, Density and Roughness measurements of thin films. Pore size measurements of porous films.
  • WA-XRD: Phase, Crystalline texture, Crystallinity, Residual stress, Grain size of polycrystlline thin films
  • XRDI: Crystalline defects, Slip bands, Edge cracking / chips, Dislocations
    •  Area uniformity (wafer mapping) for all measurements
  • No calibration samples required: X-ray metrology techniques are absolute
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Tool brochures can be found here. Related application notes can be found here.

Detail

Jordan Valley’s D1 Evolution is the latest generation of flexible X-ray diffraction instruments for thin-film materials research, process development, and quality control. Featuring fully automated source optics, the system can switch between standard XRD, High-Resolution, and X-ray reflectivity modes without user intervention. Measurements can be run in partial or fully automated modes, with user-customizable scripts handling the routine work. The instrument is designed for a variety of thin-film applications, including high resolution rocking curves, reciprocal space mapping, X-ray topography (digital imaging), X-ray reflectivity, Grazing Incidence XRD, Phase ID, residual stress, film texture and grain size analysis. The sample stage consists of a robust 5-axis Eulerian cradle, with 150 mm wafer mapping, and capacity for both large and small samples, and multi-sample locations. Leading edge data analysis packages, such as RADS and REFS provide expert data presentation and interpretation. The D1 Evolution is the ideal, multi-application thin-film materials research tool – for now and into the future.

The D1 is a materials research and development system for 200mm processes and below. Intended for use with Silicon, III/V, SiC, LED, Solar, Research and Development, & Universities.

 

Materials

The D1 Evolution can be used for virtually any thin film analysis. Some of the parameters which can be measured are:

  • Thickness
  • Composition
  • Relaxation
  • Strain
  • Area uniformity
  • Density
  • Roughness
  • Phase
  • Crystalline texture
  • Crystallinity
  •  Residual stress
  • Pore size
  • Grain size

Techniques

Specification

Source

  •   Standard 2.2kW sealed tube X-ray generator
  •   Parabolic Multilayer Mirror
  •   Choice of beam conditioning crystals for wide range of resolutions (5", 10", 12", 25")
  •   Intelligent Alignment System, automatically configuring the tool with the best optics for the specified measurement

Sample Stage

  •   Simple tilt / Z stage
  •   Full Eulerian cradle with
    • »  Highest resolution goniometer commercially available (0.16" resolution on Omega and 2Theta)
    • »  Sub-micron resolution on all translation axes
    • »  150mm scanning on X and Y, with 200mm wafer capability
    • »  135o range on tilt (Chi) for pole figure and residual stress capability
    • »  Full 360o range on Phi (rotation)
  •    Vertical geometry to avoid gravity sag

Detection

  •   High dynamic range scintillation detector (EDRc)
  •   Choice of detector optics
    • »  Dual channel triple axis analyzer crystal, with high intensity and high resolution channels for precise detector angle definition
    • »  Soller slits for polycrystalline XRD work to allow a wide parallel beam into the detector - essential for glancing incidence XRD work
  •   Motorized detector slits available
  •   Intelligent Alignment System, automatically configuring the tool with the best optics for the specified measurement