Jordan Valley extends its technology lead with the next-generation, 3-channel 6200 metrology platform

Jordan Valley continues to set a new standard in metrology with the next-generation, 3-channel JVX 6200 metrology platform. The 6200 combines high-speed XRR and XRF technology with the addition of SAXS measurement capability. The result? Unsurpassed extendibility and versatility, which deliver dramatic cost-of-ownership advantages.

• Independent Thickness, Density and Roughness Measurement
• Addition of industry-leading Small Angle X-Ray Scattering (SAXS) capability for measurement of pore size and distribution, capable of pore size determination with pore diameters down tsub-10Å.
• Significantly Improved Cost of Ownership
• Smaller maintenance footprint
• Higher throughput on XRR brightness (flux per area)
• Higher throughput on XRF flux
• Real time processing via new algorithms and dual processor
• Less frequent PM intervals
• Improved reliability via 2X longer life XRR tube, and more reliable XRF detectors
• Improved Ease-of-Use and Extendibility
• Color camera/higher magnification microscope
• New WinXP® operating system
• Improved pattern recognition with edge models and improved lowcontrast feature performance
• Improved "smart" algorithms allowing broader search ranges

• SAXS
• Better stage stepping resolution
• Smaller spot and required pad size XRR and XRF
• Better performance on high scatter samples and ultrathin films (<30Å)
• Extended thickness range XRR

• Bump Alloy Composition
• Void Detection
• Metals: Cu, Ti, Al, Ta, W, Alloys, etc.
• Dielectrics: Oxides, Nitrides, Poly, etc.
• High k and Low k Dielectrics
• Silicides: WSix, TiSix, CoSix, NiSix, etc.
• Magnetic RAM
• Multi-Layer Stacks
• Ultra-Thin Layers Down t10Å
• Epi- and Poly-Si1-x Gex Stoichiometry
• WSix, TaOx Stoichiometry
• ONO, SiON, SiRN