The newest advancements in X-ray metrology from Jordan Valley

The JVX6200i Platform dramatically improves overall system Cost of Ownership and utilization.

ADVANTAGES

• Fast X-ray Reflectance (XRR) capable of first principle independent thickness, density and roughness measurements.
• Micro-spot X-ray fluorescence (XRF) provides the smallest spot size available and multi-channel detectors for fast data acquisition.
• Small Angle X-ray Scattering (SAXS) for measurement of pore size and distribution, capable of pore size determination with pore diameters down to 7Å.
• The JVX6200i provides significant throughput improvements of all three metrology channels.
  • XRR: 25% shorter acquisition
  • XRF: 67% shorter acquisition
  • SAXS: 75% shorter acquisition
• JVX6200i also provides a significant increase in utilization with improved reliability and diagnostics capabilities.
• Industry leading Ease-of-Use:
  • Microsoft Windows® XP Professional
  • Color camera with high magnification microscope
  • Improved pattern recognition with edge models and improved low-contrast feature performance
  • Improved “smart” algorithms allowing broader search ranges
  • Available remote operations and diagnostics