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Si Semiconductors Metrology
JVX 7200
JVX 6200 Family
VUV700U
BedeMetrix™-F
BedeScan™
Compound Semi X-ray Metrology
QC-Velox: Advanced Production
QC3: Mainstream Production
D1: R&D
QC-RT: FA & R&D
RADS Software
Semiconductors FEOL
Strain Metrology
High-K & Metal Gate
Silicides
Defect Imaging
Semiconductors BEOL
Cu Seed Barrier
Cu Microstructure
Cu CMP control
Wafer Level Packaging
UBM, RDL & Bumps
Compound semiconductors
HRXRD
Relaxation & Strain
Triple Axis & RSMs
Defect Imaging
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Presentations
2006 MRS Advanced XRF And Innovative Interconnect and Process Metrology Solution for 45 nm and Beyond
2006 mrs spring 2006 jpg imec presentation.pdf
(1.45 MB)
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2007 Altech (IMEC) Characterization of HBT Base Layers by HRXRD
2007 altech imec - characterization of hbt base layers presentation.pdf
(1.05 MB)
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2008 EMC In-plane HRXRD from sSOI
2008 emc -in-plane hrxrd from ssoi extended presentation.pdf
(1.04 MB)
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2012 Semicon Korea
2012_semicon_korea_v5_public.pdf
(1.67 MB)
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