Detail

Jordan Valley's Delta-X is the latest generation of flexible X-ray diffraction instruments for thin-film materials research, process development, and quality control. Featuring fully automated source optics, the system can switch between standard XRD, High-Resolution, and X-ray reflectivity modes without user intervention. Measurements can be run in partial or fully automated modes, with user-customizable scripts handling the routine work. The instrument is designed for a variety of thin-film applications, including high resolution rocking curves, reciprocal space mapping, X-ray topography (digital imaging), X-ray reflectivity, Grazing Incidence XRD, Phase ID, residual stress, film texture and grain size analysis. The sample stage consists of a robust 5-axis Eulerian cradle, with 300 mm wafer mapping, and capacity for both large and small samples, and multi-sample locations. Leading edge data analysis packages, such as RADS and REFS provide expert data presentation and interpretation. The Delta-X is the ideal, multi-application thin-film materials research tool – for now and into the future.

The Delta-X is a materials research and development system for 300mm processes and below. Intended for use with Silicon, III/V, SiC, LED, Solar, Research and Development, & Universities.

Materials

The Delta-X can be used for virtually any thin film analysis. Some of the parameters which can be measured are:

• Thickness
• Composition
• Relaxation
• Strain
• Area uniformity
• Density
• Roughness
• Phase
• Crystalline texture
• Crystallinity
• Residual stress
• Pore size
• Grain size

Techniques

• HRXRD, relaxation and XRR of Epitaxial films (SiGe, Si:C)
• Reciprocal space maping and triple axis analyzer measurements of epitaxial films
• HRXRD of Crystalline substrates (Si, SiC, III/V)
• XRR & XRD of Polycrystalline films
• XRR and SAXS of Porous films

Specification

Source

• Standard 2.2kW sealed tube X-ray generator
• Parabolic Multilayer Mirror
• Choice of beam conditioning crystals for wide range of resolutions (5", 10", 12", 25")
• Intelligent Alignment System, automatically configuring the tool with the best optics for the specified measurement

Sample Stage

• Simple tilt / Z stage
• Full Eulerian cradle with
  • High resolution goniometer (0.2" resolution on Omega and 2Theta)
  • 10µm resolution on XY axes, 1µm resolution on Z
  • 300mm scanning on X and Y, with 300mm wafer or multiple smaller wafer capability
  • 100o range on tilt (Chi) for pole figure and residual stress capability
  • Full 360o range on Phi (rotation)
• Vertical geometry to avoid gravity sag

Detection

• High dynamic range scintillation detector (EDRc)
• Choice of detector optics
  • Triple axis analyzer crystal, for precise detector angle definition
  • Soller slits for polycrystalline XRD work to allow a wide parallel beam into the detector - essential for glancing incidence XRD work
• Motorized source and detector slits with automated attenuator
• Intelligent Alignment System, automatically configuring the tool with the best optics for the specified measurement