JVX7200 X-ray Metrology Tool

JVX 7200New X-ray metrology for advanced front-end processes  

The latest multichannel platform from Jordan Valley, the JVX7200™, provides manufacturers with production-worthy X-ray metrology capabilities for advanced front-end-of-line processes. In common with all Jordan Valley’s JVX tools, the platform was designed to provide high accuracy and repeatable metrology, high uptime and low cost-of-ownership. 

The JVX7200™configuration combines advanced high-resolution X-ray diffraction (HRXRD) and X-ray reflectivity (XRR) channels to provide composition, thickness, strain, relaxation characterization and metrology for epitaxial layers such as SiGe and Si:C, which are required for strained silicon processes. Additionally, the XRR channel can provide valuable information on other thin-films, such as those found in high-k gate stacks. The tool is capable of providing rapid, in-line measurements and analysis on both blanket and product wafers.

JVX 7200 Product received the Best of WEST Award 2010

Features

  •  Low-power, high-brightness X-ray tube
  •  Convergent beam
  •  Low-noise, high-resolution 1D detectors
  •  Small spot size
  •  Pattern recognition system
  •  High-precision staging
  •  Muti-core computer running Windows XP
  •  Advanced data analysis algorithms and software
  •  Various loadport options
  •  Proven SECS/GEM and 300 mm software
  •  High uptime and low MTBF
  •  CE, S2, S8 and Peer Group automation certifications

Benefits

  •  Dependable operation and low COO
  •  No alignment overheads
  •  Fast measurement times
  •  Product wafer capability
  •  Fast and familiar tool operation
  •  Online/offline analysis of composition, thickness, strain and relaxation of epitaxial layers
  •  Reliable and robust factory automation
  •  Low COO and high availability
  •  Safe and reliable operation

Applications